Holmium and titanium oxide nanolaminates by atomic layer deposition
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چکیده
منابع مشابه
Selective atomic layer deposition of titanium oxide on patterned self-assembled monolayers formed by microcontact printing.
We demonstrate a selective atomic layer deposition of TiO2 thin films on patterned alkylsiloxane self-assembled monolayers. Microcontact printing was done to prepare patterned monolayers of the alkylsiloxane on Si substrates. The patterned monolayers define and direct the selective deposition of the TiO2 thin film using atomic layer deposition. The selective atomic layer deposition is based on ...
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I Acknowledgements II Dedication III List of Figures V
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2014
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.06.039